Manufacturing for the Micro and Nano Scale

This course introduces students to micro and nanomanufacturing, for the creation of new generations of micro/nano-enabled materials, devices and products. The focus is particularly on those techniques and applications that are complementary to semiconductor lithography. The students will learn about the challenges for, as well as principles and techniques that allow the establishment of a controlled and high-throughput manufacturing process. Since many innovative manufacturing approaches and resulting applications are still in the research phase, students will be introduced to selected state-of-art research in the field. The course will link manufacturing (research) to a variety of existing and emerging applications.

Topics addressed in the course are:

1. Overview of micro and nanomanufacturing.

2. Selected manufacturing techniques:

2a. Multi-scale additive manufacturing

2b. Two-photon polymerization;

2c. Inkjet Printing

2d. Nano Imprint Lithography;

2e. Micro-laser cutting;

2f. Subtractive micromanufacturing;

2g. Micro-assembly.

3. Volume scale-up and integration of manufacturing processes for micro/nano-enabled materials and devices. Design for micromanufacture and assembly.