Micro- and Nanosystems Design and Fabrication, incl. MEMS Lab.

Micro and Nanosystems are devices which perform a task by a combination of actuation, sensing, and signal processing. They are either monolithically built or conceived as a hybrid and then encapsulated in a package to control the interaction with the environment. In this course we will look at the following questions: What are the key process steps and units in building micro and nanosystems and how are they linked into a proper technology? What are the design processes that are needed to build a micro- or nano-electromechanical system? How is a M/NEMS characterized?