Sensors and Actuators

The course silicon sensors and Actuators gives an overview of the most important principles related to sensors and actuators fabricated in integrated silicon technology. The sensors are divided into those for optical, mechanical, thermal, magnetic and chemical signals. These domains will be dealt with from basic principles leading to the applications. The second part of the course will deal with actuators. The actuators lectures give the range from large machines down to silicon micromachined device in the micron range.

The course is designed for students who will perform their thesis work in one of the laboratories within the faculty working on or using sensors