Physics of Electron Microscopy Instrumentation

Electron and ion beam systems are pivotal for modern-day science and technology. They provide us with the capability to see, manipulate, and make things at the smallest length scales, down to a nanometer or even almost atomic resolution. In this course you will learn the basics about the design of these instruments, and about how to do optics with beams of charged particles. You will learn how sources, lenses, aberration correctors for electrons and ions work and how they can be optimized together for best performance.

Topics treated include:
Electron sources, electrostatic lenses, magnetic lenses, multipole elements, application and simulation of multipole elements, off-axes aberrations, Coulomb interactions, electron and ion beam instruments (microscopes and lithography tools), MEMS electron optics.